450N, vacuum compatible linear actuator

LTC450 delivers nanometer resolution with load capacity of 450 N with a 20 mm stroke

Acuvi Piezo LEGS Linear 40N Piezo Motor

Sub-nanometer precision for the Semicon industry

  • True linear direct drive
  • Vacuum compatible
  • Resolution down to sub-nanometer
  • 450 N force
  • 20 mm stroke
  • Self-locking
  • No backlash

True direct linear drive

The drive technology is direct, meaning no gears or lead screws are needed to create linear motion. The motor moves by microstepping, dividing a full waveform-step into nanometer size increments. Speed ranges from nanometers per second to millimeters per second, and can be seamlessly controlled in the whole dynamic range with no need to alter the driving mode.

The twin concept makes for high force output in a compact body, in this case a stall force of 450N. This gives a more robust design without the need of ball bearings.

It has direct drive with no backlash and can microstep in the sub-nano millimeter range. Designed for vacuum environments

Full force greater then 450 Newton power-off locking safety function inherent to the design.

Specifications LEGS® LTC450 heavy duty linear actuator

Type

Vacuum (D)

Unit

Maximum stroke
20
mm
Maximum speed
Driver dependent
0.2
mm/s
Minimum speed
Driver dependent
1
μm
Stall force
450 
N
Holding force
>450
N
Vacuum
Yes
10-7 torr
Non-magnetic
No
 
Operating voltage
42-49
V
Power consumption
300
mW/Hz
Mechanical size L x H x D
with guides and encoder
N/A
mm
Mechanical size L x H x D
without guides and encoder
98 x 50 x 50
mm
Weight
with 50 mm drive rod
 1060
gram
Material in motor housing
Stainless steel
 
Operating temperature
recommended
+10 to +70 
ºC
Connector motor
Soldered cable with JST O5SR-3S
 
Connector encoder
 
 
Resolution motor
<1
nm
Built in encoder
No
 
Encoder resolution
N/A
µm

Main dimensions LTC450

Motor performance LTC450

Motor performance with waveform Rhomb (filled) and waveform Delta (dotted). The full step length is the average distance the drive rod moves when the legs take one full step (i.e. for one waveform cycle).

Note: A standard deviation σ of 0.5 μm should be taken into account.
Typical values are given for 20ºC.

Stroke range

Stroke (mm) with one adapter
Drive rod length (mm)

0-20

Fixed

Motor speed at 20 ºC no load

Waveform
Max feq. (Hz)
Speed range (mm/s)
Delta
50
0-0.15

Rhomb

0-0.2
Controller PMD401 on the left and PMD301 on the right

Controlling the motor

Our motor control units come in many different versions, with controllers and amplifiers for laboratory use as well as for integration into OEM devices.

We can also license the drivers for customers that want to build their own driver electronics.

Do you need a free consultation or a starter kit?

Request a quote

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