Compact vacuum capable linear stages

The LPS series is a low profile linear stage series with an integrated customized
linear encoder systems.

Acuvi LPS stages
Acuvi LPS stages

Compact and strong. High resolution and smooth motion.

  • Vacuum compatible
  • Resolution down to sub-nanometer
  • 10 – 20N force
  • 15 – 85 mm stroke
  • Zero drift encoder
  • Self-locking
  • No backlash

True direct linear drive

The LPS series is a low profile linear stage with an integrated customized piezo motor and linear encoder systems developed by NANOS Instruments. The stiff and robust design with cross roller bearings in steel or ceramic guarantee a smooth and highly accurate movement in the range of sub nanometers. This stage has a ultra high precision and is available in Stainless steel, Titan or Invar-36, together with a Zerodur®-like scale.

The optical sensor only generates 20mW (15mW as option) in the stage and has a special cooling profile. This results in practically zero drift with highest resolution from the first minute. This stage is available in several dimensions, also as versions with an aperture or as a goniometer, and can be combined as building blocks for a multi-axis stage. It has a high force and is ultra precise.

Specifications Acuvi LPS series stages

MOTION

Value

Unit

Active axes
X
 
Travel range in X
1-70
mm
Maximum velocity in X unloaded
15
mm/s
POSITIONING
Minimal incremental motion in X
10
nm
Unidirectional repeatability in X
20
nm
Reference switch
1x magnetic+ 2x limit switch
 
Integrated sensor
magnetic
 
System resolution in X
10
nm
Sensor resolution
10
nm
MECHANICAL PROPERTIES
Load capacity
10
N
Holding force in X
10
N
Guide
Rolling element guide / Crossed roller guide
 
Overall mass
Depending on travel range
70
g
Material
Stainless
 
MISCELLANEOUS
Connector
05SR-3S
 
Sensor connector
10XSR
 
Cable length
1
m
Recommended controllers/drivers
(B) MC101
 

Contact our engineers for more information and pricing

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