Direct linear drive 6,5N high precision piezo actuator
The LEGS® LL06 linear actuator is intended for OEM applications with focus on precise positioning in tight spaces.
6,5N force, exceptional size to force ratio and nano-precision
- 6.5 N force
- Nanometer precision
- High Resolution optical encoder
- Direct drive – Backlash free
- No power draw in hold position
- Self locking during power loss
- Quick response and high speed dynamics
The LEGS® LL06 linear actuator
A 6.5N linear direct drive piezo actuator that is extremely compact, weighing only 16 grams. It has true direct drive with no backlash and can microstep in the sub-nanometer range. It is available with or without built-in encoder (e.g., 1.25 µm or 80 nm) and/or guiding.
The LL06 is available with a high resolution position sensor, and with drive rods of different lengths (30, 40, 50, 60 and 100.8 mm). The motor is easily integrated and will most likely simplify and reduce the size of your system.
Full force 6.5 Newton power-off locking safety function.
For control of the motor we offer a range of drivers and controllers.
Specifications LEGS® LL06
|
Type |
Normal (A) |
Unit |
|
Maximum stroke
|
74.1
|
mm
|
|
Maximum speed
Driver dependent |
24
|
mm/s
|
|
Minimum speed
Driver dependent |
1
|
μm
|
|
Stall force
|
6.5
|
N
|
|
Holding force
|
>6.5
|
N
|
|
Vacuum
|
No
|
|
|
Non-magnetic
|
No
|
|
|
Operating voltage
|
42-49
|
V
|
|
Power consumption
|
5
|
mW/Hz
|
|
Mechanical size L x H x D
with guides and encoder |
23.4 x 19.6 x 10.5
|
mm
|
|
Mechanical size L x H x D
without guides and encoder |
17 x 19.6 x 7
|
mm
|
|
Weight
with 50 mm drive rod |
16
|
gram
|
|
Material in motor housing
|
Stainless steel
|
|
|
Operating temperature
recommended |
-20 to +70
|
ºC
|
|
Connector motor
|
Hirose DF52-5S-0.8H
|
|
|
Connector encoder
|
Hirose DF52-6S-0.8H
|
|
|
Resolution motor
|
<1
|
nm
|
|
Built in encoder
|
Yes
|
|
|
Encoder resolution
|
1.25 (encoder E1, guide G1)
0.08 (encoder E2, guide G1)
|
nm
|
Dimensions of the LEGS® LL06
Motor performance LL06
Motor performance with waveform Rhomb (filled) and waveform Delta (dotted). The full step length is the average distance the drive rod moves when the legs take one full step (i.e. for one waveform cycle).
Note: A standard deviation σ of 0.5 μm should be taken into account. Typical values are given for 20ºC.
Stroke range LL06
|
Stroke (mm) with one adapter
|
Drive rod length (mm)
|
|
0-3.1
|
30 (not available with encoder)
|
|
0-13.1 |
40
|
|
0-23.1 |
50
|
|
0-33.1 |
60
|
|
0-74.1 |
100.8
|
Motor speed at 20 ºC
|
Waveform
|
Max feq. (Hz)
|
Speed range (mm/s)
|
|
Delta
|
3000
|
0-15
|
|
Rhomb |
0-24
|
LL06 front and back
- Motor Housing | 2. Drive Rod | 3. Front adapter | 4. Encoder scale on drive rod | 5. Integrated encoder, 1.25µm – 80 nm resolution | 6. Built in guiding
Controlling the motor
Our motor control units come in many different versions, with controllers and amplifiers for laboratory use as well as for integration into OEM devices.
We can also license the drivers for customers that want to build their own driver electronics.
LL06 LEGS® Piezo Motor Starter Kit
Starter kits are available for the LL06 in different configurations. Starter Kits are for evaluation purposes only with a max quantity of 3 kits/customer. You only pay for the motor.
Configure the LL06 and get a quote
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