Ultra smooth Zero drift linear ultrasonic stage

Stable and accurate linear stage

Sensapex ultrasonic stage

Closed loop piezo motion stage

  • High resolution
  • Piezo technology
  • Self-locking
  • No backlash
  • Zero drift

True direct linear drive

Based on our unique and patented ZERO DRIFT piezo-technology. Here, a piezo motor moves an axis to the required position. Once this is reached, the motor is powered off and the position is maintained by a strong friction force, which clamps the axis. As a result, the linear position stays exactly the same with zero drift during static external loading conditions and constant temperature.

Each axis has an integrated linear position sensor with 5 nm resolution. With this sensor, the position of each axis is continuously measured in real time.  This allows users to confirm that the stage is indeed not drifting. More importantly, during axis movement the sensor provides feedback on the current position of the axis, ensuring that the movement stops exactly when the desired position is reached. This closed feedback loop is what enables the stage to achieve their industry-leading repeatability and accuracy.

All of this motion control is integrated within the micromanipulator itself. This means that each has a microprocessor and memory and is running a real-time operating system. This allows a single touch screen and multiwheel unit to control a nearly unlimited number of manipulators (actually 65,536).

Senspex control unit and touch screen

Controlling the motor

Our motor control units come in many different versions, with controllers and amplifiers for laboratory use as well as for integration into OEM devices.

We can also license the drivers for customers that want to build their own driver electronics.

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