Compact vacuum capable linear stages
The LPS series is a low profile linear stage series with an integrated customized
linear encoder systems.
Compact and strong. High resolution and smooth motion.
- Vacuum compatible
- Resolution down to sub-nanometer
- 10 – 20N force
- 15 – 85 mm stroke
- Zero drift encoder
- Self-locking
- No backlash
True direct linear drive
The LPS series is a low profile linear stage with an integrated customized piezo motor and linear encoder systems developed by NANOS Instruments. The stiff and robust design with cross roller bearings in steel or ceramic guarantee a smooth and highly accurate movement in the range of sub nanometers. This stage has a ultra high precision and is available in Stainless steel, Titan or Invar-36, together with a Zerodur®-like scale.
The optical sensor only generates 20mW (15mW as option) in the stage and has a special cooling profile. This results in practically zero drift with highest resolution from the first minute. This stage is available in several dimensions, also as versions with an aperture or as a goniometer, and can be combined as building blocks for a multi-axis stage. It has a high force and is ultra precise.
Specifications Acuvi LPS series stages
|
MOTION |
Value |
Unit |
|
Active axes
|
X
|
|
|
Travel range in X
|
1-70
|
mm
|
|
Maximum velocity in X unloaded
|
15
|
mm/s
|
|
POSITIONING
|
||
|
Minimal incremental motion in X
|
10
|
nm
|
|
Unidirectional repeatability in X
|
20
|
nm
|
|
Reference switch
|
1x magnetic+ 2x limit switch
|
|
|
Integrated sensor
|
magnetic
|
|
|
System resolution in X
|
10
|
nm
|
|
Sensor resolution
|
10
|
nm
|
|
MECHANICAL PROPERTIES
|
||
|
Load capacity
|
10
|
N
|
|
Holding force in X
|
10
|
N
|
|
Guide
|
Rolling element guide / Crossed roller guide
|
|
|
Overall mass
Depending on travel range |
70
|
g
|
|
Material
|
Stainless
|
|
|
MISCELLANEOUS
|
||
|
Connector
|
05SR-3S
|
|
|
Sensor connector
|
10XSR
|
|
|
Cable length
|
1
|
m
|
|
Recommended controllers/drivers
|
(B) MC101
|
|
