Linear and rotary stages

Our stages are the perfect fit for applications where size, precision and force is a challenge.

Acuvi stages

Compact stages with nanometer precision

  • Bidirectional repeatability of 0.5nm
  • Travel ranges of 10-80mm
  • Subnanometer resolution
  • Truly tiny, enabling miniaturization

Vacuum compatible 10N non-magnetic linear stage

Acuvi LPS series compact linear stage with an integrated customized piezo motor and linear encoder systems

Acuvi LPS series linear stages

Stick slip, smooth motion vibration free stage

Acuvi SPS series linear stage, self locking with no backlash and zero drift.

Acuvi SPS linear stage

Rotary + linear stage

Self locking with no backlash. Vacuum and non-magnetic versions available.

Acuvi rotary + linear stage

Linear standard stages

True Linear Direct drive, self locking with no backlash.

Acuvi standard series linear stages

The Acuvi stages are a perfect fit for OEM motion solutions

Piezo technology driven stages

Few components result in very compact motors. Unparallelled size to force ratio makes the LEGS® Piezo Motor Technology a great fit for OEM engineering challenges. Unsure about how to select a linear stage please check out our article on how to select a high precision linear stage.

The Acuvi LPS series compact stages

Our compact stages of the LPS series achieve a bidirectional repeatability of 0.5nm with travel ranges of 10-80mm even under UHV conditions or strong magnetic fields. This opens up applications that are otherwise only possible in combination with an interferometer! Even drafts or slight vibrations do not affect the accuracy of the robust tables.nanopositioning

The subnanometer resolution in conjunction with the high driving force and our high-resolution zero-drift encoders meet important requirements for the positioning of various components or samples with limited installation space and fast-response use. The individual axes are coordinated with each other and can be combined easily and precisely.

For special applications we also manufacture the tables completely from titanium or Invar with ceramic cross roller guides and an optical encoder with Robax scale available. The specially developed optical encoder only has a power loss of 20mW. This is also shaped using a cooling body. If necessary, the operation of two encoders is possible to increase the resolution or accuracy. Our unique technology is for all those who demand reproducibility. Everyone can now do high resolution, and this is where we differ significantly from our competitors, in addition to the three times the driving force.

With our magnetic encoders we achieve resolutions of up to 10nm. With the optical sensor we achieve a resolution down to 5pm. With both systems we can reduce the power loss to 15mW.

True linear motion simplifies engineering

No need for gears, spindles or mechanical transmissions. The linear direct drive is achieved with few mechanical parts.

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