Linear drive 6,5N high precision piezo actuator

The LEGS® LL06 compact linear actuator with integrated encoder and built in guiding is intended for OEM applications with focus on precise positioning in tight spaces.

Acuvi The Piezo LEGS® LL06 compact linear actuator with guiding

6,5N force, exceptional size to force ratio and nano-precision

  • 6.5 N force
  • Nanometer precision
  • High Resolution optical encoder
  • Direct drive – Backlash free
  • No power draw in hold position
  • Self locking during power loss
  • Quick response and high speed dynamics

The LEGS® LL06 linear actuator

A 6.5N linear direct drive piezo actuator that is extremely compact, weighing only 16 grams. It has true direct drive with no backlash and can microstep in the sub-nanometer range. This compact linear actuator is available with or without built-in encoder (e.g., 1.25 µm or 80 nm) and/or guiding.

The LL06 is available with a high resolution position sensor, and with drive rods of different lengths (30, 40, 50, 60 and 100.8 mm). The motor is easily integrated and will most likely simplify and reduce the size of your system.

Full force 6.5 Newton power-off locking safety function.

For control of the motor we offer a range of drivers and controllers.

Specifications LEGS® LL06

Type

Normal (A)

Unit

Maximum stroke
74.1
mm
Maximum speed
Driver dependent
24
mm/s
Minimum speed
Driver dependent
1
μm
Stall force
6.5
N
Holding force
>6.5
N
Vacuum
No
 
Non-magnetic
No
 
Operating voltage
42-49
V
Power consumption
5
mW/Hz
Mechanical size L x H x D
with guides and encoder
23.4 x 19.6 x 10.5
mm
Mechanical size L x H x D
without guides and encoder
17 x 19.6 x 7
mm
Weight
with 50 mm drive rod
16
gram
Material in motor housing
Stainless steel
 
Operating temperature
recommended
-20 to +70
ºC
Connector motor
Hirose DF52-5S-0.8H
 
Connector encoder
Hirose DF52-6S-0.8H
 
Resolution motor
<1
nm
Built in encoder
Yes
 
Encoder resolution
1.25 (encoder E1, guide G1)

0.08 (encoder E2, guide G1)
nm

Dimensions of the LEGS® LL06

Motor performance LL06

Motor performance with waveform Rhomb (filled) and waveform Delta (dotted). The full step length is the average distance the drive rod moves when the legs take one full step (i.e. for one waveform cycle).

Note: A standard deviation σ of 0.5 μm should be taken into account. Typical values are given for 20ºC.

Motor performance for LEGS LL06 linear piezo motor
Motor performance for LEGS LL06

Stroke range LL06

Stroke (mm) with one adapter
Drive rod length (mm)
0-3.1
30 (not available with encoder)

0-13.1

40

0-23.1

50

0-33.1

60

0-74.1

100.8

Motor speed at 20 ºC

Waveform
Max feq. (Hz)
Speed range (mm/s)
Delta
3000
0-15

Rhomb

0-24

LL06 front and back

Piezo LEGS linear motor front and back
  1. Motor Housing | 2. Drive Rod | 3. Front adapter | 4. Encoder scale on drive rod | 5. Integrated encoder, 1.25µm – 80 nm resolution | 6. Built in guiding
Controller PMD401 on the left and PMD301 on the right

Controlling the motor

Our motor control units come in many different versions, with controllers and amplifiers for laboratory use as well as for integration into OEM devices. These controllers are compatible with the compact linear actuator for optimal performance.

We can also license the drivers for customers that want to build their own driver electronics.

LL06 LEGS® Piezo Motor Starter Kit

Starter kits are available for the LL06 in different configurations. Starter Kits are for evaluation purposes only with a max quantity of 3 kits/customer. You only pay for the motor. Each starter kit includes a compact linear actuator.

Linear Non-Magnetic and Vacuum capable LL10D Piezo Motor
Piezo LEGS® LL06 Starter Kit

Configure the LL06 and get a quote

Encoder

Do you need an encoder for your application?

Adapter

How do you want the drive rod to be equipped?

Stroke

Which maximum stroke is required?

Other options

Choose guiding option

Package type

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